STUDI EKSPERIMENTAL MAGNETRON SPUTTERING DENGAN VARIASI RPM

The rapid development of technology according to research is increasing, especially in the use of materials in the form of making magnetron sputtering tools. For this reason, it is necessary to design a magnetron sputtering device with a variety of RPM that can be used to produce solar cells. This research develops a magnetron sputtering device from a vacuum system to a magnetron sputtering system with various RPM.This research method includes the design of chucks, and the manufacture of a magnetron sputtering device with a variation of Rpm. several tools are known, including dimensions, determining tools and materials, manufacturing processes, turning and cutting processes, and assembly processes. The clamp on the magnetron sputtering tool with variations of Rpm is made of aluminum. The results and analysis of the magnetron sputtering test with variations of Rpm using various variations from 500rpm, 1000rpm, 1500rpm, 2000rpm, 2500rpm And using a blower heater 500rpm+80℃, 1000rpm+80, 1500rpm+80, 2000rpm+ 80℃, 2500rpm + 80. For the experiments carried out using Pu paint and Pu thinner with a ratio of 1: 15. Pu paint and Pu thinner have the advantage of drying quickly. And testing this tool takes 15 minutes every 10 seconds to drip paint liquid onto a glass workpiece with different RPM variations.